a)

i) How MEMS accelerometer sensor responds to the acceleration.

ii. How the acceleration is read off the MEMS accelerometer sensor.

iii. What is the most significant sources of uncertainty in the acceleration measurement provided by the MEMS accelerometer sensor.

1.The sensing element in MEMS VC accelerometers is comprised of a micro-machined proof mass that is suspended between two parallel plates. As the proof mass moves when acceleration is applied, one air gap decreases and the other gap increases creating a change in capacitance proportional to acceleration.

2.an accelerometer is a device that measures the vibration, or acceleration of motion of a structure. The force caused by vibration or a change in motion (acceleration) causes the mass to "squeeze" the piezoelectric material which produces an electrical charge that is proportional to the force exerted upon it.

3.It can be concluded from equation (4) that the real-time displacement result of the target object can be obtained by using the real-time acceleration of the MEMS accelerometer output and the initial velocity of the object motion.